formatted tab 3 10.1 and cant install android from twrp

got a problem with my samsung tab3 10.1 (5200), installed twrp and rooted the device and after that i formatted it in twrp to install a fresh android on an empty tablet. But install couldn't work , the installer couldn't make directories data and others so the install did not work ( took about 2 minutes) but at the end it says succesfull. It cant boot past samsung logo because i think nothing really installed. Anyone has an idea to try and install in another way ? I'm trying to instal cwm now but says md5 hash invalid and same with the twrp file which is on the device.